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| 中频脉冲溅射制备绒面ZnO透明导电薄膜 | |
| 引用本文： | 刘佳宇,杨瑞霞,牛晨亮,薛俊明,赵颖,耿新华.中频脉冲溅射制备绒面ZnO透明导电薄膜[J].微纳电子技术,2006,43(4):186-189. |
| 作者姓名： | 刘佳宇 杨瑞霞 牛晨亮 薛俊明 赵颖 耿新华 |
| 作者单位： | 1. 河北工业大学信息学院,天津,300130;南开大学光电子薄膜器件与技术研究所&天津市重点实验室,光电信息技术科学教育部重点实验室,天津,300071 2. 河北工业大学信息学院,天津,300130 3. 南开大学光电子薄膜器件与技术研究所&天津市重点实验室,光电信息技术科学教育部重点实验室,天津,300071 |
| 摘 要： | 采用中频脉冲磁控溅射系统制备高透过率、高电导率的平面ZnO薄膜。电阻率为5.57×10-4Ω·cm,载流子浓度2.2×1020cm-3,霍尔迁移率40.1cm2/V·s,可见光范围内(400～800nm)的平均透过率大于85%。用酸腐蚀的方法可以获得绒面效果。分析了气压和温度对绒面结构的影响,获得了适合薄膜太阳能电池要求的绒面ZnO透明导电薄膜。 |
| 关 键 词： | 中频脉冲溅射 绒面氧化锌 透明导电膜 |
| 文章编号： | 1671-4776(2006)04-0186-04 |
| 收稿时间： | 2005-11-30 |
| 修稿时间： | 2005年11月30 |
Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering |
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| LIU Jia-yu,YANG Rui-xia,NIU Chen-liang,XUE Jun-ming,ZHAO Ying,GENG Xin-hua.Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering[J].Micronanoelectronic Technology,2006,43(4):186-189. | |
| Authors: | LIU Jia-yu YANG Rui-xia NIU Chen-liang XUE Jun-ming ZHAO Ying GENG Xin-hua |
| Abstract: | The smooth ZnO film with high conductivity and high transmission was obtained by mid-frequency magnetron sputtering.The resistivity of the film is 5.57×10-4 Ω·cm,the carrier concentration is 2.2×1020 cm-3 and the Hall mobility is 40.1 cm2/V·s.The avarage transmissivity is >85% within the visible range(400～800 nm).The textured ZnO was gained by post-deposition chemical etching.The influence of sputtering pressure and sputtering temperature on the structure of textured ZnO was analyzed.The textured ZnO for thin film solar cells was obtained. |
| Keywords: | mid-frequency sputtering textured ZnO transparent conductive film |
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