| ITO防电磁辐射玻璃制备方法及性能研究 |
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| 引用本文： | 李建涛,许晓丽.ITO防电磁辐射玻璃制备方法及性能研究[J].兵器材料科学与工程,2009,32(4). |
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| 作者姓名： | 李建涛 许晓丽 |
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| 作者单位： | 1. 太原科技大学材料科学与工程学院,山西,太原,030024;中国电子科技集团公司第三十三研究所,山西,太原,030006
2. 中国电子科技集团公司第三十三研究所,山西,太原,030006 |
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| 摘 要： | 采用直流磁控溅射技术在玻璃基板上沉积ITO薄膜,通过调整基板温度、薄膜厚度得到了最低方阻1.4Ω/□,薄膜透光率超过76%。对样品在150 kHz到18 GHz频段内电磁屏蔽效能采用屏蔽室法进行测试,1 G频率点得到的屏蔽效能最好,达到了54 dB,在屏蔽困难的低频段,150 kHz频率点的屏蔽效能达到24 dB。
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| 关 键 词： | ITO薄膜 磁控溅射 电磁屏蔽 屏蔽效能 |
Research on preparation and electromagnetic shielding properties of ITO coated glass |
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| LI Jiantao,XU Xiaoli.Research on preparation and electromagnetic shielding properties of ITO coated glass[J].Ordnance Material Science and Engineering,2009,32(4). |
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| Authors: | LI Jiantao XU Xiaoli |
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| Affiliation: | 1.Materials Science & Engineering Department;Taiyuan University of Science and Technology;Taiyuan 030024;China;2.No.33 Research Institute of CETC;Taiyuan 030006;China |
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| Abstract: | ITO films were prepared by DC magnetron sputtering on glass substrate. By adjusting the substrate temperature and film thickness,minimum sheet resistance 1.4 Ω/□ was obtained, while transmittance beyond 76%. Using shielding room method, electromagnetic shielding effectiveness(SE) of the samples was tested in 150 kHz to 18 GHz frequency bands. Best SE 54 dB was obtained at 1 G frequency. Though electromagnetic in low frequency band was difficult to shield, SE at 150 kHz frequency could still reach 24 dB. |
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| Keywords: | ITO thin film magnetron sputtering electromagnetic shielding shielding effectiveness |
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