| 一种基于MEMS的主动式光纤连接器 |
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| 引用本文： | 张丹,丁桂甫,蔡玉丽,王艳,杨卓青.一种基于MEMS的主动式光纤连接器[J].传感器与微系统,2008,27(4):92-94. |
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| 作者姓名： | 张丹 丁桂甫 蔡玉丽 王艳 杨卓青 |
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| 作者单位： | 上海交通大学,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 国家自然科学基金，上海市科技攻关项目 |
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| 摘 要： | 介绍一种基于MEMS技术的主动式光纤连接器,上层为双层结构电热驱动器,下层为硅V型槽。双层结构在常温下作为压制光纤的盖板,通电后作为单稳态电热驱动器,盖板翘曲,放入或取出光纤。利用Ansys有限元分析软件并结合工艺条件,对热驱动器部件的性能进行了分析与仿真。利用表面硅工艺和体硅工艺制备出核心驱动部分,检测盖板翘曲情况下性能。
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| 关 键 词： | 光纤连接器 微机电系统 双层薄膜 |
MEMS-based active optical fiber connector |
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| ZHANG Dan,DING Gui-fu,CAI Yu-li,WANG Yan,YANG Zhun-qing.MEMS-based active optical fiber connector[J].Transducer and Microsystem Technology,2008,27(4):92-94. |
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| Authors: | ZHANG Dan DING Gui-fu CAI Yu-li WANG Yan YANG Zhun-qing |
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| Abstract: | An optical fiber connector based on MEMS technology is presented.Nickel thin film cover plate is manufactured on the SiO2 layer above the silicon V-shaped groove to form two-layers structure.This structure can be both used as a cover plate under normal temperature and a electro-thermal micro actuator in the temperature rising process.Optical fiber can be put into the V-groove when the two-layers structure warps during this process.The relationship between the structure parameters and the thermal actuator's capability is simulated and analyzed by Ansys,the optimize structure is got. |
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| Keywords: | optical fiber connector microelectromechanical system(MEMS) two-layer thin film |
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