组合式微细电火花电极制作工艺试验研究

针对块电极磨削效率高和线电极磨削(WEDG)精度高的优点,采用块电极磨削和线电极磨削相结合的方法,在多模式脉冲电源下制定了块电极磨削作为粗磨削、线电极磨削作为中、精磨削的微细电火花电极制作工艺流程。采用去离子水作为工作液,分别对块电极磨削和线电极磨削进行了电源模式和电参数试验,分析试验结果,总结出一组适合于粗、中、精磨削的电参数组合,研究出一套加工效率高、精度高且直径一致性高的电极制作工艺方法。并通过试验验证了该工艺方法能稳定加工出长径比大于16的微细电极,利用其加工出了256个直径小于50μm、直径偏差在2μm内的微细阵列孔。

Research on the Combination Process of Micro-electrode Fabrication by Micro-EDM

Because of high efficiency of block electrode and high precision of WEDG in processing,the two processing units are combined together to study in this paper.With the multi-mode pulse generator,a method to fabricate micro-electrode is developed based on it,which contains three steps,the rough processing by block electrode,the intermediate processing and finish processing by WEDG.Using deionized water as working fluid,the tests of pulse generator mode selection and the experiments of electric parameter selection are done respectively.A group of electric parameters for the three processing steps are obtained with the experimental results.A micro-electrode fabrication method with high efficiency,high accuracy is developed eventually.At last,it’s verified with experiments that the method can stably fabricate a micro shaft whose Length/Diameter is greater than 16.And 256 array micro-holes with diameter of less than 50 μm,deviation of less than 2 μm are produced with it.