| 基于ZnO传感器的高流速气体压力测试 |
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| 引用本文： | 曾垂义,张源,徐甲强,陈学东. 基于ZnO传感器的高流速气体压力测试[J]. 传感技术学报, 2012, 25(9): 1194-1198 |
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| 作者姓名： | 曾垂义 张源 徐甲强 陈学东 |
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| 作者单位： | 1. 上海大学理学院化学系,上海,200444
2. 华中科技大学数字制造与装备技术国家重点实验室,武汉,430074 |
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| 基金项目： | 数字制造装备与技术国家重点实验室开放课题项目 |
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| 摘 要： | 针对机械系统中气体轴承间气膜压力的分布检测,提出并研发了一种基于ZnO传感器的检测方法。ZnO纳米颗粒敏感材料采用化学沉淀法制备;用X射线衍射和扫描电镜对其进行了表征。利用ZnO传感器的响应电压与动态气体压力的关系,成功测试出高压动态气体的压力。分析了氧气吸附、压电效应和热传导对响应电压的影响,拟合出对应的气体压力-响应电压关系曲线,本研究为高流速气体压力的测试提供了一种新途径。
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| 关 键 词： | 传感器 气压测试 氧化锌 纳米颗粒 |
Sensing gas pressure based on ZnO sensor under high flow rate |
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| ZENG Chuiyi , ZHANG Yuan , XU Jiaqiang , CHEN Xuedong. Sensing gas pressure based on ZnO sensor under high flow rate[J]. Journal of Transduction Technology, 2012, 25(9): 1194-1198 |
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| Authors: | ZENG Chuiyi ZHANG Yuan XU Jiaqiang CHEN Xuedong |
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| Affiliation: | 1.Shanghai University,Shanghai 200444,China; 2.State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan 430074,China) |
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| Abstract: | A new detection method based on ZnO sensors was brought forward and devised to detect and measure the gas pressure distribution for mechanical system gas bearing film pressure. ZnO nanopowder was prepared by a route of chemical precipitation, and characterized by XRD and SEM, High-velocity, pressure gas was detected successfully and the pressure- output voltage curve was draw according to the oxygen chemisorption, piezoelectric effect and heat conduction mechanism. The test had the following characters: facile operation, accurate value, quick response, visually results, and good repeatability, providing a new method for detecting the gas with high pressure and flow rate. |
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| Keywords: | Zinc oxide nanomaterials gas pressure high flow rate |
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