YBaCuO超导靶材制备工艺的研究 |
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引用本文: | 李佳.YBaCuO超导靶材制备工艺的研究[J].安徽工学院学报,1996,15(1):6-11. |
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作者姓名: | 李佳 |
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作者单位: | 安徽工学院基础部 合肥230069 |
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摘 要: | 根据超导体相YBaCu3O7-Y的晶体结构与含氧量、温度的关系,正确制订了YBaCuO超导靶材的烧结工艺-预烧温度、烧结温及冷却速度,从而为用直流磁控溅射法研制高Tc、大临界电流密度Jc的超导薄膜提供了前提。
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关 键 词: | 超导薄膜 YBaCuO 超导靶材 超导体 制备 |
STUDY ON SINTERING PROCESS FOR YBACUO SUPERCONDUCTING TERGET |
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Authors: | Li Jia |
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Affiliation: | Basic Courses Department |
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Abstract: | According to the relationship between the crystal structure of superconducting phase YBa2Cu3O7-y and the temperature, and its Oxygen content, a suitable sintering process (presintering temperature, sintering temperature, and cooling rate) for preparing YBaCuO superconducting target has been successfully formulated. And then, high - Tc and critical current density (Jc) have been obtained by using DC magnetron sputtering method. |
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Keywords: | superconducting thin film magnetron sputtering |
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