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YBaCuO超导靶材制备工艺的研究
引用本文:李佳.YBaCuO超导靶材制备工艺的研究[J].安徽工学院学报,1996,15(1):6-11.
作者姓名:李佳
作者单位:安徽工学院基础部 合肥230069
摘    要:根据超导体相YBaCu3O7-Y的晶体结构与含氧量、温度的关系,正确制订了YBaCuO超导靶材的烧结工艺-预烧温度、烧结温及冷却速度,从而为用直流磁控溅射法研制高Tc、大临界电流密度Jc的超导薄膜提供了前提。

关 键 词:超导薄膜  YBaCuO  超导靶材  超导体  制备

STUDY ON SINTERING PROCESS FOR YBACUO SUPERCONDUCTING TERGET
Authors:Li Jia
Affiliation:Basic Courses Department
Abstract:According to the relationship between the crystal structure of superconducting phase YBa2Cu3O7-y and the temperature, and its Oxygen content, a suitable sintering process (presintering temperature, sintering temperature, and cooling rate) for preparing YBaCuO superconducting target has been successfully formulated. And then, high - Tc and critical current density (Jc) have been obtained by using DC magnetron sputtering method.
Keywords:superconducting thin film  magnetron sputtering  
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