具有纳米调制结构的AlTiN/AlCrN复合涂层在干摩擦条件下的摩擦磨损性能研究

目的 研究干摩擦条件下不同AlTiN/AlCrN多层膜纳米调制结构对摩擦磨损行为的影响。方法 将处理过的合金工具钢和单晶硅片作为膜层生长的基底材料，在膜层制备之前，先对基底材料进行预处理，然后使用多靶磁控溅射纳米膜层系统沉积一系列不同调制周期和调制比的AlTiN/AlCrN纳米多层膜。通过控制涂层总厚度不变，在调制比为1︰1时，设计不同的调制周期，择优选出磨损量最小、耐磨性最好的调制周期，并以此为恒定值，进而设计不同调制比的试样。采用X射线衍射仪(XRD)、摩擦磨损试验机分析与表征纳米多层膜的微观结构和性能，研究调制周期和调制比对AlTiN/AlCrN纳米多层膜微观结构和干摩擦条件下摩擦磨损性能的影响。结果 AlTiN/AlCrN纳米多层膜主体均为面心立方结构，且在(111)、(200)和(220)晶面择优取向。调制结构对多层膜的磨损特性影响较大，当调制周期为14.4 nm时，在干摩擦条件下AlTiN/AlCrN纳米多层膜的摩擦磨损量最小;在调制周期恒定为14.4 nm情况下，当调制比为3︰1时，在干摩擦条件下AlTiN/AlCrN纳米多层膜的耐磨性能最好;AlTiN/AlCrN纳米多层膜的磨损机理主要以磨粒磨损和黏附磨损为主。结论 优化的AlTiN/AlCrN多层膜纳米调制结构技术可应用在切削刀具的表面再制造领域，从而延长刀具工作寿命，通过涂层良好的耐磨性能提升设备的加工效率。

Friction and Wear Properties of AlTiN/AlCrN Composite Coatings with Nano Modulation Structure under Dry Friction Conditions

The work aims to investigate the effect of different AlTiN/AlCrN multilayer nano modulation structures on their friction and wear behavior under dry friction conditions. The treated alloy tool steel and monocrystalline silicon were used as the substrate materials for film growth. Before the film was prepared, the substrate materials were pretreated, and then a series of AlTiN/AlCrN nano multilayers with different modulation periods and modulation ratios were deposited with a multi-target magnetron sputtering nano film system; by controlling the total thickness of the coating to remain unchanged, different modulation periods were designed at a modulation ratio of 1:1. After selecting the modulation period with the least wear loss and the best wear resistance, it was used as a constant value, and then different modulation ratio samples were designed; the microstructure and properties of nano multilayers were analyzed and characterized with a diffractometer (XRD) and a friction and wear tester. The effects of modulation period and modulation ratio on the microstructure of AlTiN/AlCrN nano multilayers and the friction and wear properties under dry friction conditions were studied. The experimental results showed that the main body of AlTiN/AlCrN nano multilayer films was a face centered cubic structure, with preferred orientation on the (111), (200), and (220) crystal planes of this structure. The modulation structure had a significant impact on the wear characteristics of multilayer films. When the modulation period was 14.4 nm, the friction and wear amount of AlTiN/AlCrN nano multilayer films was the smallest under dry friction conditions; when the modulation period was constant at 14.4 nm and the modulation ratio was 3:1, the wear resistance of AlTiN/AlCrN nano multilayer films was the best under dry friction conditions; the wear mechanism of AlTiN/AlCrN nano multilayer films was mainly abrasive wear and adhesive wear. In conclusion, the optimized AlTiN/AlCrN multilayer nano modulation structure technology can be applied in surface remanufacturing of cutting tools, thereby extending the tool''s service life and improving equipment processing efficiency through its good wear resistance.