Scanning-laser-beam semiconductor pH-imaging sensor

We have constructed a two-dimensional (2-D) pH-imaging sensor that enables us to observe th H⁺ distribution produced by living cells. The pH-sensing principle is similar to that of thelight-addressable potentiometric sensor. The electrolyte-insulator-semiconductor (EIS) structure (electrolyte---Si₃N₄---SiO₂---Si) is illuminated by a focused (1 μm) and modulated (1–10 kHz) He—Ne laser bean from the backside of the semiconductor, and the a.c. photocurrent flowing through the EIS structure is measured. By scanning the laser beam, 2-D pH images can be obtained. By using this sensor, pH distributions of colonies of yeast (Saccharomyces cerevisiae) have been observed. The spatial resolution of this sensor could be improved by thinning the Si wafer.