Algorithms and machining experiments to reduce depth errors in servo scanning 3D micro EDM

In servo-scanning 3D micro electro discharge machining (SS-3D MEDM), the depth errors of 3D micro cavities are accumulated layer by layer due to the contour scanning process with keeping discharge gap for compensating axial electrode wear in real time. In this research, the errors’ causes were analyzed, and then a layer depth constrained algorithm (LDCA) and an S-curve accelerating algorithm (SCAA) were proposed to reduce the depth errors. By LDCA, over-cutting errors can be avoided by controlling a tool-electrode feed maximum at every scanning spot. As a supplementary algorithm for LDCA, SCAA can compensate insufficient-machining errors at start and end of scanning paths. Implementation process and control strategy of the algorithms were also described. The purpose of this research is to efficiently machine complex 3D micro-cavities with high accuracies of shape and surface. By use of computer-aided manufacturing software of Pro/Engineer to plan complex 3D scanning paths, machining experiments were carried out to verify the proposed algorithms. The experimental results show: Typical 3D micro cavities <800 μm can be automatically machined, and the machining accuracies of micro surfaces and edges are obviously improved, and the depth errors can be controlled within 2 μm, and the material removal rate reaches 2.0 × 10⁴ μm³/s with tool electrode of ∅80 μm and its rotational speed of 1000 r/min. In addition, the 3D micro cavities designed on unknown edge or hollow workpieces can be successfully formed.