Suspended channel MEMS fabrication process for advanced device design and bio-analytical functionalization |
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| Authors: | Alexander Vladimirov Grigorov |
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| Affiliation: | MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU-Bldg 345E, DK-2800 Kgs. Lyngby, Denmark |
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| Abstract: | This paper reports a simple and novel process that allows the fabrication of suspended channel MEMS devices. Two basic types of suspended structures were fabricated using the new process, and a possible functionalization mechanism for bio-analytical detection and sensing using spotting and capillary action was successfully tested.Possible uses of the fabricated structures are described, as specific existing types of biochemical MEMS sensors. |
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| Keywords: | MEMS Suspended channels Angled deposition Surface stress detection Resonant cantilever Mass detection |
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