三明治结构大量程MEMS惯性伺服加速度计研究

良好稳定性和大量程设计一直是困扰微惯性加速度计研制的两个难题，文中对影响微加速度计稳定性的丰要因素(外置偏压和横向加速度干扰)进行了详细分析，对加速度计各参数对量程的本质影响及其相互关系进行了研究，理论分析和计算机仿真结果表明：根据给出的四梁中心悬臂结构，在典型结构参数下，惯性敏感单元可承受的最大横向加速度达2000g以上，采取质量块减薄和打孔并用的方法可以保证加速度计具有70g以上量程。

Research on the MEMS Inertial Servo-accelerometer with Large Measurement Range and Sandwich Structure

Good stability and large measurement range design are always two problems in the development of micro-inertial accelerometer. In this paper, the applied bias voltage and lateral accelerations disturbance are analyzed in detail, which are the main factors having influence on the stability of micro-accelerometer. The essential influences of the parameters on the measurement range and the mutual relations are studied. The results of theoretical analysis and computer simulation show: according to the given four central suspension beams structure, the maximum allowable lateral acceleration to inertial sensitive unit is larger than 2 000 g in the typical structural parameters, it is assured that the measurement range of the accelerometer will be higher than 70 g by using the method of reducing the mass thickness and holing in the seismic mass.