| 超微粒氧化锌薄膜的制备及表面STM观测 |
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| 引用本文： | 王巍,戴建明,谢敬波,王春瑞,王声乐,潘孝仁. 超微粒氧化锌薄膜的制备及表面STM观测[J]. 传感器与微系统, 1998, 0(6) |
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| 作者姓名： | 王巍 戴建明 谢敬波 王春瑞 王声乐 潘孝仁 |
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| 作者单位： | 淮北煤炭师范学院物理系，华东理工大学 |
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| 摘 要： | 作者在大气、常温环境条件下，对采用直流气体放电活化反应蒸发沉积法制备的超微粒氧化锌薄膜的表面构象进行了扫描隧道显微镜观察，获得了一些用传统电子显微镜所难以观察到的新现象，并结合工艺条件对其构象作了一定程序的解释，提出了热处理对其表面构象的影响。
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| 关 键 词： | 扫描隧道显微镜 超微粒子 表面 择优生长 |
Preparation and STM Observation of ZnO UFP Thin Films |
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| Wang Wei Dai Jianming Xie Jingbo Wang Chunrui Wang Shengyue. Preparation and STM Observation of ZnO UFP Thin Films[J]. Transducer and Microsystem Technology, 1998, 0(6) |
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| Authors: | Wang Wei Dai Jianming Xie Jingbo Wang Chunrui Wang Shengyue |
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| Abstract: | The images of ZnO UFP(Ultrafine Particles)thin film prepared by dc discharge activating reaction evaporation technique were observed by STM in atmosphere.Some results which were very difficult to be obtained by TEM had been discovered.The author explained its mechanism combining with processing conditions,and the effect of heat treatment on its morphology had been discussed. |
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| Keywords: | Seanning tunneling microscope(STM) Ultrafine partical(UFP) Surface Growth of preferred orientation |
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