Textured tin dioxide films for gas recognition microsystems

We have studied the microstructure, electrical properties, and gas sensor characteristics of thin tin dioxide (SnO₂) films obtained by RF magnetron sputtering of an oxide target. The synthesized films are composed of crystalline rods with a diameter of 10–60 nm and a length of up to 1000 nm oriented perpendicularly to the substrate plane. This morphology facilitates the access of gas molecules to the side surfaces of crystallites. Use of such SnO₂ films in a multisensor microsystem expanded the spectrum of recognized gases.