| SnO2纳米颗粒多孔薄膜气敏传感器对CO气体的敏感性 |
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| 引用本文： | 丁占来王建强 安寸然 任德亮侯哲哲. SnO2纳米颗粒多孔薄膜气敏传感器对CO气体的敏感性[J]. 传感技术学报, 2006, 19(1): 78-80,86 |
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| 作者姓名： | 丁占来王建强 安寸然 任德亮侯哲哲 |
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| 作者单位： | 1. 石家庄铁道学院,材料科学与工程系,河北,石家庄,050043
2. 河北科技大学,理学院,河北,石家庄,050054 |
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| 摘 要： | 在适当的条件下分解有机金属前驱体[Sn(N(CH3)2)2]2制备了尺寸分布集中的SnO2纳米颗粒.二氧化锡纳米颗粒胶体沉积到气体传感器的硅基础结构上形成纳米颗粒多孔薄膜传感层,并对传感层进行金属Pt元素原位掺杂.在专用实验台上测定了SnO2纳米颗粒传感器对CO 气体的敏感性,结果显示此传感器对CO气体表现出较好的敏感性和稳定性.
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| 关 键 词： | 气体传感器 二氧化锡 纳米颗粒 敏感性 |
| 文章编号： | 1005-9490（2006）01-0078-03 |
| 收稿时间： | 2005-05-24 |
| 修稿时间： | 2005-05-24 |
CO Sensitivity of SnO2 Nanoparticle Porous Layer Gas Sensors |
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| DING Zhanlai,WANG Jianqiang,AN Cunran,REN Deliang,HOU Zhezhe. CO Sensitivity of SnO2 Nanoparticle Porous Layer Gas Sensors[J]. Journal of Transduction Technology, 2006, 19(1): 78-80,86 |
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| Authors: | DING Zhanlai WANG Jianqiang AN Cunran REN Deliang HOU Zhezhe |
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| Affiliation: | 1 Department of Material Science and Engineering, Shijiazhuang Railway Institute, Hebei,Shijiazhuang 050043,China; 2. College of Science, Hebei University of Science and Technology, Hebei Shijiazhuang 050054, China |
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| Abstract: | Decomposition of the organometallic precursor [Sn(N(CH_3)_2)_2]_2 in a controlled condition leads to the formation of monodisperse SnO_2 nanoparticles. A porous structure nanoparticles sensing-layer is formed by depositing of tin dioxide nanoparticles colloid on micromachined silicon platform of gas sensor. And the sensing-layer is in-situ doped by platinum element. The responses to CO gas of the SnO_2 nanoparticles sensor are tested on test bench. The sensors display comparatively high sensitivity and stability for CO sensing. |
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| Keywords: | gas sensor tin dioxide nanoparticles sensitivity |
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