Patterning of high T c superconducting thin films by copper-vapour laser

The projection microscope, based on a copper-vapour laser (CVL), is a unique system which combines the capabilities of a high magnification optical microscope and the performance of a high quality laser. The system performance with respect to high T _c superconducting (HTSC) device technology was studied using a scanning electron microscope. CVL patterning of YBaCuO films was demonstrated down to less than 2 μm. The thin films could be partially etched in depth just by controlling the laser pulse power density. In addition in HTSC device applications it could remove layers from thin films up to a complete etching.