硅微陀螺仪的误差分析

以z轴硅微陀螺仪为研究对象,对加工误差产生的误差信号进行了分析.由于加工误差,使得陀螺仪结构不对称,主要表现为支承梁不对称、梳齿间距不等,产生了不等弹性、阻尼不对称以及力不平衡这三种现象.以动力学方程为基础,分析了不等弹性和阻尼不对称产生的误差信号;以静电理论为基础,分析了驱动梳齿和敏感梳齿间距不等时产生的误差信号.分析结果表明,这些误差信号包含了正交耦合误差和与有用信号同相位的误差信号.最后,介绍了一种减小正交误差的方法,并进行了仿真.

Study on the effects of machining error on the Z-axis silicon microgyroscope

The error signals of z-axis silicon microgyroscopes are analyzed which are induced with the machining error. For the machining error, the structure of microgyroscope is asymmetrical, such as mismatched suspensions and unequal gaps among combs. The imperfection microgyroscope results in the anisoelasticity, asymmetrical damping and unbalanced force. Based on the dynamic equations, the anisoelasticity and unbalanced damping are analyzed. And with the basis of the static theory, the error signals induced with unbalanced force are put forward. The results of analysis show the error signals include the quadrature error and the error signals in phase with the useful signal. At last, one method to decrease the quadrature error is introduced and the results of simulation are present.