| 提高S波段大功率晶体管内匹配电容的可靠性 |
| |
| 引用本文： | 潘宏菽,潘茹,姚素霞,梁士领,苏丽娟. 提高S波段大功率晶体管内匹配电容的可靠性[J]. 微纳电子技术, 2000, 0(6) |
| |
| 作者姓名： | 潘宏菽 潘茹 姚素霞 梁士领 苏丽娟 |
| |
| 作者单位： | 河北半导体研究所!河北石家庄050002 |
| |
| 摘 要： | 对影响 S波段大功率晶体管内匹配电容的质量问题进行了分析 ,并给出了改进方法 ,提高了内匹配大功率晶体管的稳定性和可靠性。
|
| 关 键 词： | 内匹配 MOM电容 粘附能力 表面改性 |
Improving the reliability of internal matching capacitor in S-band high power transistor |
| |
| PAN Hong-shu,PAN Ru,YAO Su-xia,LIANG Shi-ling,SU Li-juan. Improving the reliability of internal matching capacitor in S-band high power transistor[J]. Micronanoelectronic Technology, 2000, 0(6) |
| |
| Authors: | PAN Hong-shu PAN Ru YAO Su-xia LIANG Shi-ling SU Li-juan |
| |
| Abstract: | In this paper,the quality problem of internal matching capacitor in S-band high power transistor is analyzed.The improving method is given.The stability and reliability of internal matching high power transistor are improved. |
| |
| Keywords: | internal match MOM capacitor sticking ability surface modificatioP |
| 本文献已被 CNKI 等数据库收录！ |
|
