| 纳米技术发展动向 |
| |
| 引用本文： | 朱曾惠.纳米技术发展动向[J].化工新型材料,1999(2). |
| |
| 作者姓名： | 朱曾惠 |
| |
| 作者单位： | 中国化工信息中心 |
| |
| 摘 要： | 对纳米技术来说是越精细越好。当前研究重点是弄清和创制纳米级材料。本文介绍了纳米技术发展中的四个主要趋势：①光刻印刷技术中的革命；②改进硅芯片和扩大应用；③纳米技术促进相关技术发展；④纳米材料和工艺过程的应用开发。
|
| 关 键 词： | 纳米技术，发展趋势，光刻印刷芯片 |
RECENT TRENDS OF NANOTECHNOLOGY DEVELOPMENT |
| |
| Zhu Zenghui.RECENT TRENDS OF NANOTECHNOLOGY DEVELOPMENT[J].New Chemical Materials,1999(2). |
| |
| Authors: | Zhu Zenghui |
| |
| Affiliation: | CNCIC 100029 |
| |
| Abstract: | For nanotechnology,small is beautiful.Research is focusing on understanding and creating material on the nanometer scale.In this article,four of the development trend are introduced:1,Revolutionary improvement in photolithography;2,Improving performance of silicon chip and extending application;3,Nanotechnology promotes related technologies development;and 4,Application development of material and process on the nanometer scale. |
| |
| Keywords: | nanotechnology development trend photolithography chip |
| 本文献已被 CNKI 等数据库收录！ |
