一种实用纳米级位移测量校准器

提出基于新型共光路激光干涉原理的纳米级位移测量校准器，建立了其测量的数学模型，分析了其误差特性。由于采用相移干涉的相位分析技术实现波长小数测量，该测量校准器的精度好于0．5nm，量程达到几个mm；又由于共光路和紧凑的结构设计，因而具有良好的抗干扰特性，能够应用于一般实验环境。

DESIGN OF A CONVENIENT NANOMETER DISPLACEMENT CALIBRATOR

As the technology development is shifting the focus to the nanometer level tools and devices, low cost and convenient measurement and calibration of displacement at the level of nanometer is becoming increasingly demanded. To meet the demand, a new nanometer displacement measurement and calibrating design is proposed. The calibrator is based on the laser interference principle with a novel common-path design. Mathematical models are presented and the error characteristics are examined. The resolution of the calibrator is expected to be better than 0.Snm, and the measurement range better than 3mm. The size of the proposed calibrator is expected to be compact. Due to the commonath and compact design, the calibrator should have a good anti-disturbance ability, and so can be applied conveniently in wide fields.