| 脉冲真空电弧离子镀在不锈钢上沉积类金刚石薄膜的研究 |
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| 引用本文： | 周顺,严一心.脉冲真空电弧离子镀在不锈钢上沉积类金刚石薄膜的研究[J].真空,2005,42(4):15-18. |
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| 作者姓名： | 周顺 严一心 |
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| 作者单位： | 西安工业学院,薄膜技术与光学检测重点实验室,陕西,西安,710032 |
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| 摘 要： | 利用脉冲真空电弧离子镀技术在3Cr13不锈钢上制备了类金刚石(DLC)薄膜,通过Raman光谱分析了膜的结构特征,采用摩擦磨损试验机测试了薄膜在不同载荷下的摩擦系数,运用划痕仪研究了膜基的结合强度.结果表明:所镀制的薄膜具有典型类金刚石结构特征,膜中ID/IG为1.33;摩擦系数随着载荷的增大而减小,载荷为5 N,转速120 r/min时的摩擦系数为0.12;Ti过渡层的引入显著地提高了膜基结合力.
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| 关 键 词： | 类金刚石薄膜 脉冲电弧 摩擦系数 不锈钢 |
| 文章编号： | 1002-0322(2005)04-0015-04 |
Structure and mechanical properties of DLC films by pulsed vacuum arc ion deposition |
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| ZHOU Shun,YAN Yi-xin.Structure and mechanical properties of DLC films by pulsed vacuum arc ion deposition[J].Vacuum,2005,42(4):15-18. |
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| Authors: | ZHOU Shun YAN Yi-xin |
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| Abstract: | Diamond-like carbon (DLC) films with a Ti buffer layer were prepared on 3Cr13 stainless steel substrates by pulsed vacuum arc ion deposition. The films were characterized by Raman spectroscopy and the friction coefficient of the DLC films sliding against a GCr15 ball were measured under different loads on a ball-disk friction/wear tester. The interfacial adhesion was investigated on a scribe tester and the DLC films deposited were found having typical diamond-like characteristics, such as good friction-reducing/anti-wear behavior and decreasing friction coefficient with icreasing load exerted on the films. Moreover, the interfacial adhesion was improved remarkably by adding a Ti buffer layer. |
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| Keywords: | DLC film pulsed arc friction coefficient stainless steel |
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