| 新型聚酰亚胺图形化工艺制备视网膜电极 |
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| 引用本文： | 徐旻,陈迪,周然,陈翔,朱军,刘景全.新型聚酰亚胺图形化工艺制备视网膜电极[J].微纳电子技术,2010,47(2). |
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| 作者姓名： | 徐旻 陈迪 周然 陈翔 朱军 刘景全 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
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| 基金项目： | 国家863计划资助项目(2006AA04Z356,2006AA04Z308) |
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| 摘 要： | 介绍了一种新型的、基于Cu牺牲层的聚酰亚胺图形化方法制备视网膜电极的MEMS工艺,并对其电化学性能进行了表征。该工艺创新性地以Cu作为衬底聚酰亚胺图形化的牺牲层,以PDMS(聚二甲基硅氧烷)作为剥离层,以聚酰亚胺作为封装材料,以惰性金属作为电极保护层材料,通过电铸、牺牲层和抛光打磨工艺,制备出可以自释放的柔性视网膜电极;随后,对器件进行封装,并对器件的表面形貌和电学性能进行了表征。视网膜电极器件厚度50μm,电路线宽50μm,阻抗104～105Ω。通过该工艺制得的人造视网膜电极具有柔软无伤害、生物相容以及低成本的优点。
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| 关 键 词： | MEMS 生物电极 牺牲层 聚酰亚胺 光刻 |
New Fabrication of Retina Electrodes by Micro-Patterning of PI |
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| Xu Min,Chen Di,Zhou Ran,Chen Xiang,Zhu Jun,Liu Jingquan.New Fabrication of Retina Electrodes by Micro-Patterning of PI[J].Micronanoelectronic Technology,2010,47(2). |
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| Authors: | Xu Min Chen Di Zhou Ran Chen Xiang Zhu Jun Liu Jingquan |
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| Affiliation: | Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education;National Key Laboratory of Micro/Nano Fabrication Technology;Research Institute of Micro/Nano Science and Technology;Shanghai Jiao Tong University;Shanghai 200240;China |
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| Abstract: | A new MEMS fabrication process of artificial retina electrodes by the sacrificial-layer-removing method for the micro-patterning of PI was introduced.The electrochemical perfor-mance of the retina electrodes was characterized.The self release and flexible retina electrodes were fabricated through the electroform,sacrificial-layer-removing and polishing with the Cu sacrificial-layer,PDMS release layer,PI package material and inert metal electrode protective layer.Then,the devices were packaged,and the surfac... |
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| Keywords: | MEMS bio-electrode sacrificial layer PI lithography |
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