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| 二氧化硅微球的扫描电镜测长及形貌观察条件 | |
| 引用本文： | 朴玲钰,常怀秋,刘军涛,贺蒙,任湘菱,唐芳琼.二氧化硅微球的扫描电镜测长及形貌观察条件[J].电子显微学报,2008,27(5). |
| 作者姓名： | 朴玲钰 常怀秋 刘军涛 贺蒙 任湘菱 唐芳琼 |
| 作者单位： | 1. 国家纳米科学中心,北京,100190 2. 天美(中国)科学仪器有限公司,北京,100009 3. 中国科学院理化技术研究所,北京,100190 |
| 基金项目： | 科技部重大科学研究计划，中国科学院知识创新工程项目 |
| 摘 要： | 本文用日立S-4800型冷场发射扫描电镜对不同粒径二氧化硅微球进行测长研究及形貌观察,针对二氧化硅材料特性和工作目标,使用多种测试条件,通过结果对比,分别获得测定二氧化硅微球直径和进行形貌观察的适宜条件. |
| 关 键 词： | 扫描电镜 二氧化硅微球 形貌 直径 |
Conditions for topography and diameter analysis of SiO_2 micro-ball by scanning electron microscope |
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| PIAO Ling-yu,CHANG Huai-qiu,LIU Jun-tao,HE Meng,REN Xiang-ling,TANG Fang-qiong.Conditions for topography and diameter analysis of SiO_2 micro-ball by scanning electron microscope[J].Journal of Chinese Electron Microscopy Society,2008,27(5). | |
| Authors: | PIAO Ling-yu CHANG Huai-qiu LIU Jun-tao HE Meng REN Xiang-ling TANG Fang-qiong |
| Affiliation: | PIAO Ling-yu1,CHANG Huai-qiu1,LIU Jun-tao2,HE Meng1,REN Xiang-ling3,TANG Fang-qiong3(1.National Center for Nanoscience , Technology,Beijing 100190,China,2.TECHCOMP(Holdings)Limited,Beijing 100009,3.Technical Institute of Physics , Chemistry,Chinese Academy of Science,Beijing 100080,China) |
| Abstract: | The diameter and topography of SiO_2 micro-ball with different diameters is observed by Hitach S-4800 Scanning Electron Microscope in this paper.The various analysis conditions are investigated for different analysis aim,such as scanning speed,acceleration voltage,work distance,probe current and so on.The appropriate conditions are obtained for observating topography and diameter of SiO_2 micro-ball by comparing the experimental data.The conductivity is lower for SiO_2 material.The imaging mode with slow sp... |
| Keywords: | scanning electron microscope SiO_2 micro-ball topography diameter |
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