一种超精密大行程导轨直线度检测新方法

导轨直线度是超精密加工与检测机床最重要的基本几何误差之一,对机床性能影响很大。通过分析导轨直线度测量方法的研究现状,指出各测量方法在超精密大行程导轨直线度测量中的不足,提出一种导轨直线度检测的新方法,即采用加工和保存相对容易的短基准平尺进行拼接重构,采用最小二乘处理各段数据,获得大行程导轨全频段直线度数据。并通过实验验证:用此拼接方法所得导轨直线度与用基准长平尺测量的导轨直线度形状一致,数值基本相同。因此,采用此种方法可实现米级导轨直线度准确测量,并可实现导轨直线度误差补偿控制,将有效提升机床的精度水平。

A New Method for Measurement of Straightness of Ultra-precise Guideway with Large Distance

Guideway straightness is one of the most basic geometric error of ultra-precise machining tools and measurement de-vices, and it has influence on the machine tool. The research status of measurement methods for guideway straightness was analyzed, the disadvantages of different measurement methods in straightness measurement of ultra-precise guideway were pointed out, and a new method for straightness measurement was proposed. The short standard flat ruler was used for being joined which was machined and saved easily, and least squares method was used to deal with measurement data in order to acquire all straightness measurement data of guideway with large distance. The test indicates that the guideway measurement shape and data of the joining method are consistent with those of long standard flat ruler. Therefore, the meter level guideway straightness measurement and error compensation control can be realized by this method to improve the machine tool precision.