微机械电容式麦克风的仿真研究

针对麦克风产品开发成本过高问题,对麦克风的制造工艺进行了研究,提出了一种用仿真代替实验的方法,利用Intelli Suite软件中的Blueprint设计麦克风制作过程中所使用的掩膜版图,再利用Intelli Suite软件中Intelli Fab模块对器件进行了微电容式麦克风的工艺流程仿真,仿真出麦克风器件,再利用Intelli Suite软件中的3D BUILDER,TEM两个子模块,仿真得到了微机械电容式麦克风的灵敏度、吸合电压以及固有频率等参数,该仿真过程得到的相关参数能够为微机械电容式麦克风性能的佐证提供参考,并指导学者对微电容式麦克风产品的开发与设计过程。分析结果表明,此过程能够代替实际的开发的制造过程,达到节约产品开发成本的目的。

Simulation of micro-mechanical capacitive microphone

In order to solve the problem of the high cost of the development of the micro-mechanical capacitive microphone,we designed the mask of microphone by Blueprint module inIntellisuiteTM,we simulated the process flow of microphone by IntelliFab module in IntelliSuiteTM in this paper.At the end of simulation,the module of microphone could be geted,then the 3D BUILDER,TEM module in IntelliSuiteTM were used to get sensitivity,pull-in voltage and frequency response of microphone.The relevant parameters of micro mechanical capacitive microphone according to the simulation process could provide a reference and guide the products development and design process of the microphone.The results indicate that the process can replace the actual development of the manufacturing process and aimed at saving the cost of product development.