| 基于PSD的激光微位移测量系统 |
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| 引用本文： | 蒋丽雁,李立群.基于PSD的激光微位移测量系统[J].工具技术,2013,47(4):70-72. |
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| 作者姓名： | 蒋丽雁 李立群 |
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| 作者单位： | 成都工具研究所有限公司 |
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| 摘 要： | 介绍了一种基于二维位置敏感探测器PSD的激光光斑位置测量系统。与传统的方法相比,该系统改进了硬件和软件设计方法来实现PSD外围信号处理,它可以测量微米级位置的移动,实验结果表明系统测量精度在5μ之内。
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| 关 键 词： | PSD 激光测量 信号处理 |
Laser Displacement Measurement System Based on PSD |
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| Jiang Liyan
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Li Liqun.Laser Displacement Measurement System Based on PSD[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2013,47(4):70-72. |
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| Authors: | Jiang Liyan Li Liqun |
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| Abstract: | A new laser bean displacement measurement system based on PSD will be introduced.Compared with traditional signal process circuit of PSD,this system improved the design methord of hardware and software.It can measure displacement with micron accuracy.The experiments show that the measurement accuracy is less than five micron. |
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| Keywords: | PSD laser measurement signal process |
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