| 脉冲激光MEMS加工技术 |
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| 引用本文： | 李艳宁,唐洁,饶志军,宋晓辉,胡晓东,傅星,胡小唐.脉冲激光MEMS加工技术[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 李艳宁 唐洁 饶志军 宋晓辉 胡晓东 傅星 胡小唐 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室 天津300072
(李艳宁，唐洁，饶志军，宋晓辉，胡晓东，傅星)，天津大学精密测试技术及仪器国家重点实验室 天津300072(胡小唐) |
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| 摘 要： | 阐述了脉冲激光微加工技术及其在微机电系统 (MEMS)加工中的应用。脉冲激光微加工技术能够制作出三维微型结构并具有微米 /亚微米加工精度 ,且适用于多种材料 ,与传统的微细加工技术如光刻、刻蚀、体硅和面硅加工技术等相比具有其独到之处。进一步阐述了基于激光烧蚀的脉冲激光直接微加工技术、激光 LIGA技术、激光辅助沉积与刻蚀技术以及MEMS的激光辅助操控及装配技术
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| 关 键 词： | 脉冲激光 微机电系统 激光烧蚀 激光-LIGA技术 |
Applications of pulsed laser microfabrication technology in MEMS |
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| LI Yan ning,TANG Jie,RAO Zhi jun,SONG Xiao hui,HU Xiao dong,FU Xing,HU Xiao tang.Applications of pulsed laser microfabrication technology in MEMS[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | LI Yan ning TANG Jie RAO Zhi jun SONG Xiao hui HU Xiao dong FU Xing HU Xiao tang |
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| Abstract: | The pulsed laser microfabrication technologies and their applications in MEMS manufacture are reviewed. The high energy pulsed lasers have 3 dimension microstructure fabrication capabilities with micro/sub micro precision, and are applicable to a wide range of materials. Therefore, compared with traditional microfabrication technologies, such as lithography, etching, bulk and surface silicon micromaching processes, pulsed laser microfabrication processes are quite unique.The pulsed laser direct fabrication of MEMS, laser LIGA processes, laser assisted etching and deposition processes, laser assisted micromanipulation and assembly technologies are discussed. |
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| Keywords: | pulsed laser MEMS laser ablation laser LIGA |
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