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Fabrication and characterization of an AlGaN/PZT detector
Authors:Zhang Yan  Sun Jinglan  Wang Nili  Han Li  Liu Xiangyang  Li Xiangyang  Meng Xiangjian
Affiliation:1. State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083,China
2. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083,China
Abstract:Design,fabrication and characterization of a novel two-color detector for ultraviolet and infrared applications are reported.The detector has a simple multilayer structure composed of n-Al0.3Gao07N/i-GaN/p-GaN/SiO2/LaNiO3/PZT/Pt fabricated on a sapphire substrate.Ultraviolet and infrared properties are measured.For the ultraviolet region,a flat band spectral response is achieved in the 302-363 ran band.The detector displays an unbiased responsivity of 0.064 AAV at 355 nm.The current-voltage curve shows that current at zero bias is -1.57 × 10-12 A.This led to a detectivity of 1.81 × 1011 cm · Hz 1/2AV.In the infrared region,the detectivity of the detector is 1.58x 105cm·Hz1/2AV at μm.
Keywords:AlGaN/PZT  dual-band detector  UV/IR  responsivity  detectivity
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