Fabrication and characterization of an AlGaN/PZT detector |
| |
Authors: | Zhang Yan Sun Jinglan Wang Nili Han Li Liu Xiangyang Li Xiangyang Meng Xiangjian |
| |
Affiliation: | 1. State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083,China 2. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083,China |
| |
Abstract: | Design,fabrication and characterization of a novel two-color detector for ultraviolet and infrared applications are reported.The detector has a simple multilayer structure composed of n-Al0.3Gao07N/i-GaN/p-GaN/SiO2/LaNiO3/PZT/Pt fabricated on a sapphire substrate.Ultraviolet and infrared properties are measured.For the ultraviolet region,a flat band spectral response is achieved in the 302-363 ran band.The detector displays an unbiased responsivity of 0.064 AAV at 355 nm.The current-voltage curve shows that current at zero bias is -1.57 × 10-12 A.This led to a detectivity of 1.81 × 1011 cm · Hz 1/2AV.In the infrared region,the detectivity of the detector is 1.58x 105cm·Hz1/2AV at μm. |
| |
Keywords: | AlGaN/PZT dual-band detector UV/IR responsivity detectivity |
本文献已被 CNKI 万方数据 等数据库收录! |
| 点击此处可从《半导体学报》浏览原始摘要信息 |
|
点击此处可从《半导体学报》下载全文 |
|