A novel modified charge pumping method for trapped charge characterization in nanometer-scale devices |
| |
| Zhu Peng, Pan Liyang, Gu Haiming, Qiao Fengying, Deng Ning, Xu Jun. A novel modified charge pumping method for trapped charge characterization in nanometer-scale devices[J]. Journal of Semiconductors, 2010, 31(10): 104008. doi: 10.1088/1674-4926/31/10/104008 Zhu P, Pan L Y, Gu H M, Qiao F Y, Deng N, Xu J. A novel modified charge pumping method for trapped charge characterization in nanometer-scale devices[J]. J. Semicond., 2010, 31(10): 104008. doi: 10.1088/1674-4926/31/10/104008.Export: BibTex EndNote |
| |
| Authors: | Zhu Peng Pan Liyang Gu Haiming Qiao Fengying Deng Ning Xu Jun |
| |
| Affiliation: | Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China |
| |
| Abstract: | A new modified method based on the charge pumping technique is proposed and adopted to extract the lateral profiles of oxide charges in an advanced MOSFET. A 0.12 μm SONOS device with 50 nm threshold voltage peak is designed and utilized to demonstrate the proposed method. The trapped charge distribution with a narrow peak can be precisely characterized with this method, which shows good consistency with the measured threshold voltage. |
| |
| Keywords: | charge pumping trapped charge distribution localized VT |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《半导体学报》浏览原始摘要信息 |
|
点击此处可从《半导体学报》下载全文 |
|
