| 辉光放电清洗效果的质谱分析 |
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| 引用本文： | 黄天斌,陈旭,金奇计,查良镇.辉光放电清洗效果的质谱分析[J].真空,2005,42(5):29-31. |
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| 作者姓名： | 黄天斌 陈旭 金奇计 查良镇 |
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| 作者单位： | 清华大学电子工程系,北京,100084 |
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| 基金项目： | 致谢感谢北京创威纳科技有限公司的韩阶平老师、林红工程师等和本实验室的朱秀珍、曾鹏等对实验提供的很多帮助. |
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| 摘 要： | 在辉光放电清洗的实验研究中, 应用质谱技术进行了出气分析,应用其结果对射频辉光放电清洗的效果进行评估.实验结果表明,质谱技术能准确地分析表面吸附气体的分压强,氦离子的轰击可去除以及置换出样品中的气体,氮气、氧气和油蒸气在辉光放电清洗后的出气量下降,有利于超高真空的获得和维持.
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| 关 键 词： | 辉光放电清洗 质谱分析 表面出气 |
| 文章编号： | 1002-0322（2005）05-0029-03 |
| 收稿时间： | 2005-05-25 |
| 修稿时间： | 2005-05-25 |
Mass spectrometry for glow discharge cleaning effect |
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| HUANG Tian-bin,CHEN Xu,JIN Qi-ji,CHA Liang-zhen.Mass spectrometry for glow discharge cleaning effect[J].Vacuum,2005,42(5):29-31. |
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| Authors: | HUANG Tian-bin CHEN Xu JIN Qi-ji CHA Liang-zhen |
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| Abstract: | A series of experiments were carried out to assess the effect of glow discharge cleaning by way of mass spectrometry. The results revealed that mass spectrometry can analyze exactly the partial pressures of the gas absorbed on materials surface, and the helium ion bombardment can remove and replace the gas of the sample to analyze. The outgassing rates of nitrogen, oxygen and oily vapor all decrease after glow discharge cleaning. It is therefore proved beneficial to ultra-high vacuum acquisition and maintenance. |
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| Keywords: | glow discharge cleaning mass spectrometery surface outgassing |
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