Affiliation: | (1) Department of Materials Science and Engineering, Korea University, 1, 5-Ka, Anam-Dong, Sungbuk-Ku, Seoul, 136-701, Korea;(2) Semiconductor Technology Division, Electronics and Telecommunications Research Institute, Yusong, P.O. Box 106, Taejon, 305-600, Korea;(3) New Materials Evaluation Center, Korea Research Institute of Standards and Science, Yusong, P.O. Box 102, Taejon, 305-600, Korea |