| 气浮支承精密运动平台的俯仰振动分析 |
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| 引用本文： | 吴志会,张鸣,姜伟,金建新.气浮支承精密运动平台的俯仰振动分析[J].机械与电子,2012(2):3-7. |
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| 作者姓名： | 吴志会 张鸣 姜伟 金建新 |
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| 作者单位： | [1]华中科技大学数字制造装备与技术国家重点实验室,湖北武汉430074 [2]清华大学精密仪器与机械学系,北京100084 |
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| 基金项目： | 基金项目：国家重点基础研究发展计划资助项目（2009CB724200）;国家高技术研究发展计划资助项目（2009AA042148） |
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| 摘 要： | 参考有限元分析结果，建立了精密运动平台结构的多刚体离散元模型，依据模态实验结果进行模型验证和修正，利用所建模型分析直线非质心驱动，以及气浮支承作用点漂移对运动平台俯仰振动的影响，提出改进措施，为后续设计提供指导。
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| 关 键 词： | 精密运动平台 建模 振动分析 |
Pitching Vibration Analysis of Precision Motion Stage with Air - bearings |
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| WU Zhi-hui,ZHANG Ming,JIANG Wei,JIN Jian-xin.Pitching Vibration Analysis of Precision Motion Stage with Air - bearings[J].Machinery & Electronics,2012(2):3-7. |
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| Authors: | WU Zhi-hui ZHANG Ming JIANG Wei JIN Jian-xin |
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| Affiliation: | WU Zhi- hui ,ZHANG Ming ,JIANG Wei ,JIN Jian- xin (1. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China ; 2. Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084 ,China; ) |
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| Abstract: | We build the multi- rigid- body dis- crete element model of the precision motion stage reference to finite element analysis result, validate and update the model according to modal experi- mental results. The analysis on the influence of the driving force not being applied at the center of gravity and floating of air bearing action point on the pitching vibration of precision motion stage is taken with the built model, and improvement ap- proaches are proposed to guide subsequent design. |
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| Keywords: | precision motion stage modeling vibration analysis |
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