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95%Al2O3陶瓷的MoO3体系低温金属化机理研究
引用本文:陈欣,杨洁,黄刚,陈弹蛋,向军,李天涛,刘平. 95%Al2O3陶瓷的MoO3体系低温金属化机理研究[J]. 真空电子技术, 2021, 0(1): 62-66,83
作者姓名:陈欣  杨洁  黄刚  陈弹蛋  向军  李天涛  刘平
作者单位:中国工程物理研究院流体物理研究所
摘    要:本文采用由MoO3加活化剂组成的配方对氧化铝陶瓷进行低温金属化,通过对氧化铝陶瓷、金属化层的显微结构及元素的分布情况来探索氧化铝陶瓷的低温金属化机理。研究发现金属化层中大部分MoO3还原成活性较好的Mo颗粒,Mo颗粒间相互烧结连通为主体金属海绵骨架,同时少量的Mo氧化物与MnO、Al2O3、SiO 2、CaO等形成玻璃熔体,MnO、Al2O3、SiO 2、CaO之间也会形成MnO-Al2O3-SiO2-CaO系玻璃熔体,从而获得致密、Mo金属与玻璃熔体相互缠绕、包裹的金属化层。金属化层中的两种玻璃熔体先后渗透、扩散进入氧化铝陶瓷晶界从而实现陶瓷与金属化层之间的连接。金属化层中还原的Mo金属与Ni层之间形成Mo-Ni合金,从而实现Ni层与金属化层之间的结合。

关 键 词:低温金属化  95%Al2O3陶瓷陶瓷  活化剂  玻璃相

Study on Low-Temperature Metallization Mechanism of MoO3System for 95%Al2O3Ceramics
CHEN Xin,YANG Jie,HUANG Gang,CHEN Dan-dan,XIANG Jun,Li Tian-tao,LIU Ping. Study on Low-Temperature Metallization Mechanism of MoO3System for 95%Al2O3Ceramics[J]. Vacuum Electronics, 2021, 0(1): 62-66,83
Authors:CHEN Xin  YANG Jie  HUANG Gang  CHEN Dan-dan  XIANG Jun  Li Tian-tao  LIU Ping
Affiliation:(Institute of Fluid Physics,CAEP,Mianyang 621900,China)
Abstract:A formula composed of MoO3and activator is used to metallize alumina ceramics at low temperature,and the low temperature metallization mechanism of alumina ceramics is explored through the microstructure and element distribution of alumina ceramics and metallization layers.The study shows that most of the MoO3in the metallization layer is reduced to active Mo particles.The Mo particles are sintered and connected together to form the main metal sponge skeleton.At the same time,a small amount of Mo oxide forms a glass phase with MnO,Al2O3,SiO 2,CaO,etc.MnO,Al2O3,SiO2,CaO also form a glass phase of MnO-Al2O3-SiO2-CaO.Therefore,a dense metallization layer of intertwined,wrapped Mo metal and glass phase is developed.The two glasses melt in the metallization layer and then infiltrate and diffuse into the alumina ceramic grain boundary successively to achieve connection of the ceramic and the metallization layer.Mo-Ni alloy is formed by the reduced Mo in the metallization layer and the Ni layer,thereby achieving bonding of the Ni layer and the metallization layer.
Keywords:Low temperature metallization  95%Al 2O 3 ceramics  Activator  Glass phase
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