Integrated biosensor employing a surface photovoltage technique

A monolithically integrated biosensor is constructed using a surface photovoltage (SPV) technique combined with a new patterning method for multiple enzyme integration. The SPV method provides a contactless sensing system leading to patterning flexibility. Photolithographical patterning methods using a water-soluble photocrosslinkable polymer (copolymer of dimethylacrylamide and cinnamoyloxyethylmethacrylate) are applied to immobilize the enzyme on a semiconductor surface. For bonding the enzyme membrane to the semiconductor surface, photoreactive poly-(meta azide styrene) is used, which bonds covalently with both the enzyme membrane and substrate. A pen-printing method has also been proposed for the patterning of enzyme films, which provides a simple method suitable for mass production.