用透射光谱和模拟退火算法确定薄膜光学常数

提出了用透射光谱曲线和模拟退火算法同时确定薄膜材料折射率n、消光系数k及薄膜厚度d的方法,并给出了严格的理论公式和计算程序框架图。为了验证此方法的准确性和可行性,先进行了计算模拟,然后对SiNx薄膜进行了测量。模拟结果与理论值非常接近,根据实验结果恢复出来的曲线与原始实验曲线吻合得很好。此方法具有非破坏性、测量简单、操作方便、稳定性好和计算收敛速度快、精度高等特点。

Determination of optical constants of thin films by means of transmission spectra and simulated annealing algorithm

A method is proposed to determinate the reflective,extinction coefficient and th ickness of thin film material at the same time by means of transmission spectral and simulated annealing algorithm.The strict calculating formula and program di agram are provided.To check the accuracy and feasibility of the method,numerical simulation is first done,and then the SiN x thin films are tested.Simulate d results are highly closed to theoretical values,and reproduced curve in terms of the experimental results conforms to initial experimental curve.This method h as a lot of advantages such as no damage,simplicity of measurement,facility of m anipulation,good stability,fast convergence and high accuracy.