| 形状参数对MEMS霍尔器件性能影响研究 |
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| 引用本文： | 宋明歆 宫纯青 贺训军 殷景华 刘晓为. 形状参数对MEMS霍尔器件性能影响研究[J]. 传感技术学报, 2006, 19(5): 2054-2056 |
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| 作者姓名： | 宋明歆 宫纯青 贺训军 殷景华 刘晓为 |
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| 作者单位： | 1. 哈尔滨理工大学应用科学学院,哈尔滨,150080
2. 哈尔滨工业大学MEMS中心,哈尔滨,150001 |
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| 摘 要： | 利用有限元分析软件ANSYS对长方形和圆形两种霍尔器件的工作状态进行模拟,分析霍尔片(霍尔器件工件区域)结构尺寸与霍尔器件灵敏度的关系,研究形状对器件灵敏度的影响.结果表明:圆形霍尔片灵敏度比长方形霍尔片的高,当圆形霍尔片的半径与厚度比值为15时,灵敏度最高.
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| 关 键 词： | MEMS 有限元法 霍尔器件 器件结构 |
| 文章编号： | 1004-1699(2006)05-2054-03 |
| 修稿时间： | 2006-07-01 |
Study on the Effects of Shape Parameters on MEMS Hall Device Properties |
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| SONG Ming-xin,GONG Chun-qing,HE Xun-jun,YIN Jing-hu,LIU Xiao-wei. Study on the Effects of Shape Parameters on MEMS Hall Device Properties[J]. Journal of Transduction Technology, 2006, 19(5): 2054-2056 |
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| Authors: | SONG Ming-xin GONG Chun-qing HE Xun-jun YIN Jing-hu LIU Xiao-wei |
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| Abstract: | The working state of circular and quadrate Hall devices is simulated by ANSYS that is a kind of the finite elements analysis software. The effect of the shape of Hall board on the sensitivity is studied by analyzing relation between structural size of Hall board (the active part of Hall device) and sensitivity of Hall device. The simulation results show that the sensitivity of circular Hall board is higher than that of quadrate Hall board, particularly, sensitivity is highest when the ratio of the circular Hall board's radius to the thickness is 15. |
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| Keywords: | MEMS |
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