衍射谱位相恢复——一种测量波像差的新方法

1.通常用干涉方法测量光学系统的波像差,但由于干涉法需要参考波面,因而在实际应用中有一定限制.Sarnik提出了一种通过恢复点扩散函数(PSF)的位相半反演空间望远镜波像差的方法.但由于在像点附近能量高度集中,探测器易于饱和;并且对高分辨率光学系统(例如高倍显微物镜),常规探测器的分辨率不易满足需要.本文提出一种简单的用衍射谱分析光学系统波像差的方法,可以避免干涉法的一些缺点.并且由

phase retrieval of diffraction spectrum——a new method for measuring wavefront errors

CCD linear array is used to measure the diffraction power spectrum, and the diffradtion spectrum that goes through the slit and the tested optical system is obtained. By retrieval of the phase of the diffraction spectrum, the wavefront errors of the tested optical system is obtained.