| MEMS机油压力传感器设计 |
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| 引用本文： | 关荣锋,王晓雪.MEMS机油压力传感器设计[J].传感器与微系统,2009,28(6):86-88. |
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| 作者姓名： | 关荣锋 王晓雪 |
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| 作者单位： | 1. 河南理工大学,材料科学与工程学院,河南,焦作,454000
2. 河南理工大学,理化系,河南,焦作,454000 |
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| 基金项目： | 河南省科技攻关计划资助项目 |
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| 摘 要： | 由于汽车应用环境相当恶劣，对机油压力传感器的可靠性要求很高。采用波纹膜片隔离技术设计了一种新型的MEMS机油压力传感器。分析了波纹膜片、充油腔体结构及硅油对压力传感器性能的影响。理论和实验结果指出，合理的设计波纹结构、充油腔体结构、减小腔体体积及净化好硅油是获得高性能机油压力传感器的关键.研制的传感器在温度为-40—125℃，量程为0．6MPa的工作条件下，测量精度优于1．5％。
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| 关 键 词： | 微机电系统 压力传感器 机油压力 封装设计 |
Design of MEMS engine oil pressure sensor |
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| GUAN Rong-feng,WANG Xiao-xue.Design of MEMS engine oil pressure sensor[J].Transducer and Microsystem Technology,2009,28(6):86-88. |
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| Authors: | GUAN Rong-feng WANG Xiao-xue |
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| Affiliation: | GUAN Rong-feng, WANG Xiao-xue ( 1. School of Materials Science and Engineering, Henan Polytechnic University, Jiaozuo 454000, China; 2. Department of Physics and Chemistry, Henan Polytechnic University, Jiaozuo 454000, China) |
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| Abstract: | There are high reliability requirements for the MEMS oil pressure sensors because of worse automotive application environment.A new type MEMS oil pressure sensor based on ripple membrane isolating technique is designed.The effect of the ripple membrane and the cavity structure of filling oil on sensor performance is analyzed.The theory analyzing and experimental results demonstrate to design suitably the ripple membrane and the cavity structure,reduce cavity volume and purify silica oil are a key to improve oil pressure sensor performances.The measuring precise of developed sensors is superior to 1.5 % at-40～125 ℃ and 0.6 MPa. |
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| Keywords: | MEMS pressure sensor oil pressure packaging design |
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