| X射线—极紫外光学中的超精密加工及其应用 |
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| 引用本文： | 难波义治.X射线—极紫外光学中的超精密加工及其应用[J].光学精密工程,1993,1(1):7-12. |
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| 作者姓名： | 难波义治 |
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| 作者单位： | 中部大学机械工程系, 日本 |
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| 摘 要： | 短波光学技术的发展对高精密超光滑表面提出了严格要求。在X射线—极紫外光学中,光学元件表面粗糙度均方根值必须达到埃量级。制造这样表面的超精加工包括切割、研磨和抛光等工艺过程。本文介绍一种制造X射线望远镜中非球面镜的复制方法。
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| 关 键 词： | 超光滑表面 粗糙度 非球面镜 |
| 收稿时间： | 1993-01-18 |
Ultra-precision Machining and It's Application for X-Ray/EUV Optics |
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| Yoshiharu Namba.Ultra-precision Machining and It's Application for X-Ray/EUV Optics[J].Optics and Precision Engineering,1993,1(1):7-12. |
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| Authors: | Yoshiharu Namba |
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| Affiliation: | Department of Mechanical Engineering, Chubu University, 1200 Malsumolocho, Kangai, Aichi, 487, Japan |
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| Abstract: | Extremely smooth surfaces in high precision have been demanded with developing the science and technology on optics in shorter wavelength.The ultra-presision machining processes such as cutting, grinding and polishing have been mentioned as the process which can make smooth surfaces of subnanometer rms level in surface roughness for X-ray/EUV optics. A method of making replicated aspherical X-ray mirrors for a telescope is also described. |
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| Keywords: | Eexfremely Smooth Surfaces Roughness Aspherical Mirrors |
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