| 微型电容式压力传感器中的温度效应 |
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| 引用本文： | 黄哲琳,冯勇建.微型电容式压力传感器中的温度效应[J].传感技术学报,2006,19(5):1807-1809. |
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| 作者姓名： | 黄哲琳 冯勇建 |
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| 作者单位： | 1. 厦门大学电子工程系,福建,厦门,361005
2. 厦门大学机电工程系,福建,厦门,361005 |
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| 摘 要： | 主要介绍了利用硅-硅键合技术制作的微型电容式温度传感器的温度效应,给出了详细的制作工艺.文中对测试装置进行了详细介绍和深入分析.最后对制作的传感器器件进行了测试,并对测试结果进行分析.结果表明这种微传感器的温度影响需要校正,否则影响传感器的的线性工作范围.
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| 关 键 词： | 传感器 电容式 温度测试 MEMS |
| 文章编号： | 1004-1699(2006)05-1807-03 |
| 修稿时间： | 2006年7月1日 |
Temperature Affect of the Micro Capacitive Pressure Sensor |
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| Huang Zhelin,Feng Yongjian.Temperature Affect of the Micro Capacitive Pressure Sensor[J].Journal of Transduction Technology,2006,19(5):1807-1809. |
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| Authors: | Huang Zhelin Feng Yongjian |
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| Affiliation: | 1Dept. of Electronic Engineering, Xiamen University, Xiamen Fujian 361005
2 Dept. of Electronic-Mechanical Engineering,, Xiamen University, Xiamen Fujian 361005 |
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| Abstract: | This paper introduces a micro capacitive pressure sensor fabricated by Si-Si fusion bonding technology. The main fabrication process is given. The testing equipment is introduced and analyzed.Some testing experiments are done for the produced capacitive pressure micro sensors. Through analysis of the results, it has been proved that this type of micro sensor has obviously the effect of temperature. In order to achieve relatively high sensitivity and stability, the capacitive pressure sensor should be calibrated. |
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| Keywords: | MEMS |
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