Impact of high-k spacer on device performance of a junctionless transistor

The impact of spacer dielectric on both sides of gate oxide on the device performance of a symmetric double-gate junctionless transistor (DGJLT) is reported for the first time. The digital and analog performance parameters of the device considered in this study are drain current (I _D ), ON-state to OFF-state current ratio (I _ON /I _OFF ), subthreshold slope (SS), drain induced barrier lowering (DIBL), intrinsic gain (G _m R _O ), output conductance (G _D ), transconductance/drain current ratio (G _m /I _D ) and unity gain cut-off frequency (f _T ). The effects of varying the spacer dielectric constant (k _sp ) on the electrical characteristics of the device are studied. It is observed that the use of a high-k dielectric as a spacer brings an improvement in the OFF-state current by more than one order of magnitude thereby making the device more scalable. However, the ON-state current is only marginally affected by increasing dielectric constant of spacer. The effects of spacer width (W _sp ) on device performance are also studied. ON-state current marginally decreases with spacer width.