老化工艺对纳米多孔二氧化硅薄膜微观结构影响

本文主要探讨了老化时间与处理温度对纳米多孔二氧化硅薄膜结构的影响。结果表明随着老化时间的增加，薄膜的三维网状结构越明显、孔径分布更均匀、孔隙率越高、孔径越大。经450℃高温热处理后，颗粒长大，孔径增大，孔径分布不均匀，且薄膜厚度几乎不受老化时间的影响，说明湿凝胶薄膜在异丙醇气氛下老化后的强度是足够抵抗凝胶薄膜在异丙醇溶剂中老化放生的变化过程而引起的薄膜收缩。

Effect of age process on the microstructure of nanoporous silica film

The relationships of age process and the microstructure of nanoporous silica film were discussed in this paper.Results showed that：with the increasing of aged time,the web structure come up,the pore size was apt to more mean, and the pore ratio was higher. After 450℃ treatment, the particle size grew bigger and the thickness of silica film was hardly unchanged,Which indicated that the strength of nanoporous silica film after aged treatment was high enough to resist the stress during aged process.