| Al含量对TiAlSiN薄膜常温及高温微观形貌的影响 |
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| 引用本文： | 王昕,徐建华,马胜利,徐可为.Al含量对TiAlSiN薄膜常温及高温微观形貌的影响[J].煤矿机械,2010,31(7). |
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| 作者姓名： | 王昕 徐建华 马胜利 徐可为 |
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| 作者单位： | 西安交通大学,金属材料强度国家重点实验室,西安,710049 |
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| 摘 要： | 采用弧离子增强磁控溅射(AEMS)方法制备了TiAlSiN多元硬质薄膜,研究了不同Al含量对薄膜常温及高温微观形貌的影响。结果表明,此类薄膜均具有致密的显微组织,对应于特定Al含量,薄膜表面形貌最优,缺陷最少;薄膜高温热稳定性和抗氧化能力优异,800℃未观察到明显的表面显微组织变化。
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| 关 键 词： | 硬质薄膜 磁控溅射 表面形貌 |
Effects of Al Content on Surface Morphology of TiAlSiN Films at Different Temperatures |
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| WANG Xin,XU Jian-hua,MA Sheng-li,XU Ke-wei.Effects of Al Content on Surface Morphology of TiAlSiN Films at Different Temperatures[J].Coal Mine Machinery,2010,31(7). |
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| Authors: | WANG Xin XU Jian-hua MA Sheng-li XU Ke-wei |
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| Abstract: | Arc Enhanced Magnetron Sputtering(AEMS)was used to deposit multi-component hard films TiAlSiN on steel and wafer.The effect of different Al content on surface morphology of the films at different temperatures,as room temperature and 800~1 200 ℃,was investigated.The results indicated that the films deposited by AEMS had a dense,non-columnar structure and the finest microstructure was corresponding to some specific Al content.Thermal stability and oxidation resistance of the films were excellent and no decomposition was observed even at 800 ℃. |
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| Keywords: | hard films magnetron sputtering morphology |
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