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TEM and TEM-EDX Analysis of Cross-section of TiO_2Thin Film and Glass Substrate
作者单位:YU Xingang; MA Hongwen; LUO Wuwen; ZHOU Ao; KOU Qinghua; ZHAO Huifeng (Department of Materials Science,CUG,Beijing,100083,China);(Research Institute of Glass,CBMA)
摘    要:


TEM and TEM-EDX Analysis of Cross-section of TiO_2Thin Film and Glass Substrate
YU Xingang, MA Hongwen, LUO Wuwen, ZHOU Ao, KOU Qinghua, ZHAO Huifeng. TEM and TEM-EDX Analysis of Cross-section of TiO_2Thin Film and Glass Substrate[J]. Journal of University of Science and Technology Beijing, 1997, 0(2)
Authors:YU Xingang   MA Hongwen   LUO Wuwen   ZHOU Ao   KOU Qinghua   ZHAO Huifeng
Abstract:TiO2 thin film was deposited on Na-Ca-Si glass substrate by sol-gel process. TEM observation showed that the film is compactly joined to the substrate. TEM-EDX analyses of the film, film-substrate interface, and substrate revealed that the diffusion of Na+ from the substrate to the film is negative diffusion.
Keywords:thin film   sol-gel   titania   diffusion
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