| 超薄薄膜反射镜面形光机集成分析 |
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| 引用本文： | 齐迎春,安源,金光,许艳军. 超薄薄膜反射镜面形光机集成分析[J]. 半导体光电, 2006, 27(5): 563-565 |
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| 作者姓名： | 齐迎春 安源 金光 许艳军 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,吉林,长春,130033;中国科学院研究生院,北京,100039;中国科学院长春光学精密机械与物理研究所,吉林,长春,130033;吉林大学,吉林,长春,130025 |
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| 摘 要： | 运用有限元法对不同工况下平面薄膜反射镜的变形进行了计算。用Gram-smith正交化方法处理了Zernike多项式，并编制了光机接口程序，计算Zernike系数，对反射镜波前进行拟合，对外载荷对超薄薄膜反射镜的影响进行了分析。
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| 关 键 词： | 薄膜反射镜 Zernike多项式拟合 有限元 集成分析 |
| 文章编号： | 1001-5868(2006)05-0563-03 |
| 收稿时间： | 2005-11-25 |
| 修稿时间： | 2005-11-25 |
Optical/Mechanical Integration of Hyper-thin Membrane Mirror with Large Aperture |
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| QI Ying-chun,AN Yuan,JIN Guang,XU Yan-jun. Optical/Mechanical Integration of Hyper-thin Membrane Mirror with Large Aperture[J]. Semiconductor Optoelectronics, 2006, 27(5): 563-565 |
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| Authors: | QI Ying-chun AN Yuan JIN Guang XU Yan-jun |
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| Affiliation: | 1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, CHN ; 2. Graduate School of Chinese Academy of Sciences, Beijing 100039, CHN; 3. Jilin University, Changchun 130025, CHN |
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| Abstract: | By using finite element method, the deformations of flat membrane mirror have been calculated. Zernike polynomial has been processed by using Gram-smith orthogonalization method, and the optical and mechanical interface program has been programmed. The coefficients of Zernike polynomial are got, and the wave front of the membrane mirror under different loads is fitted. The effects of external loads on hyper-thin membrane reflector are analyzed. |
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| Keywords: | membrane mirror Zernike polynomial finite element integration analysis |
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