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MEMS-based microheaters integrated gas sensors
Authors:Avneet Singh  Anjali Sharma  Nidhi Dhull  Anil Arora  Monika Tomar
Affiliation:1. Department of Physics and Astrophysics, University of Delhi, Delhi, India;2. Department of Physics, Atma Ram Sanatan Dharma College, University of Delhi, Delhi, India;3. Department of Electronics and Communication Engineering, Thapar University, Patiala, India;4. Department of Physics, Miranda House, University of Delhi, Delhi, India
Abstract:Abstract

In the present work efforts have been made to develop microheater integrated gas sensors with low power consumption. The design and simulation of a single-cell microheater is carried out using ANSYS. Low power consumption (<35?mW) platinum micro-heater has been fabricated using bulk micromachining technique on silicon dioxide membrane (1.5?μm thin), which provided improved thermal isolation of the active area of 250?×?250?μm2. The micro-heater has achieved a maximum temperature of ~950?°C at an applied dc voltage of 2.5 V. Fabricated mircro-heater has been integrated with SnO2 based gas sensors for the efficient detection of H2 and NO2 gases. The developed sensors were found to yield the maximum sensing response of ~184 and ~2.1 with low power consumption of 29.18 and 34.53?mW towards the detection of 1?ppm of NO2 gas and 500?ppm of H2 gas, respectively.
Keywords:Micro-heaters  MEMs  gas sensor  semiconducting thin film
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