Electroplated CoPt magnets for actuation of stiff cantilevers |
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| Authors: | Loke Y C Hofbauer W Lu P Ansari K Tang X S O'Shea S J |
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| Affiliation: | Institute of Materials Research and Engineering, Agency for Science Technology and Research (A?STAR), 3 Research Link, 117602, Singapore. |
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| Abstract: | A cantilever has been microfabricated for use in non-contact Atomic Force Microscopy (AFM) using a very thick magnetic film to actuate the cantilever motion. The thick magnetic block is deposited electrochemically over a defined area of the cantilever. This cantilever is particularly suitable for driving stiff AFM cantilevers in a liquid environment. Clean mechanical resonances are easily observed. Examples are given of a hard (CoPt) magnet of dimension 29 × 21 × 6 μm(3) electroplated on Silicon cantilevers of stiffness ~22 N/m, giving a static displacement of ~0.2 nm in an applied field of 10(-3) T. |
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