| 用脉冲激光沉积法制备类金刚石膜及金刚石薄膜 |
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| 引用本文： | 刘秋香 王金斌. 用脉冲激光沉积法制备类金刚石膜及金刚石薄膜[J]. 半导体光电, 1998, 19(4): 249-251,255 |
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| 作者姓名： | 刘秋香 王金斌 |
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| 作者单位： | 湘潭大学 |
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| 摘 要： | 简要评述了用脉冲激光沉积技术制备类金刚石膜及金刚石薄膜的研究进展，总结了激光脉冲沉积制备薄膜的基本原理及其特点，分析了激光波长，能量，衬底温度等对薄膜质量的影响。
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| 关 键 词： | 脉冲激光沉积 类金刚石薄膜 金刚石薄膜 |
Preparation of diamond-like carbon films and diamond films by pulsed laser deposition |
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| LIU Qiuxiang WANG Jinbin YANG Guowei. Preparation of diamond-like carbon films and diamond films by pulsed laser deposition[J]. Semiconductor Optoelectronics, 1998, 19(4): 249-251,255 |
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| Authors: | LIU Qiuxiang WANG Jinbin YANG Guowei |
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| Abstract: | The development of diamond-like carbon films and diamond films prepared by pulsed laser deposition is reviewed,followed by summarization of mechanism and characteristics of thin films by pulsed laser deposition.The effect of laser wavelength and energy,and substrate temperature,etc.on growth of the films is discussed. |
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| Keywords: | Pulsed Laser Deposition Diamond-like Carbon Film Diamond Film |
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