新型惯性式微驱动器及其在微纳米定位中的应用

研制了一种基于压电陶瓷的惯性式微驱动器,其驱动电压直接由电子线路产生。介绍了微驱动器的工作原理和结构设计,测试了微驱动器的位移特性和动态响应性能。结果表明,在电压幅值20V~350V、频率20H z~125H z范围内,微驱动器可产生平稳和均匀的运动,平均步长在60nm~1502nm范围内连续可调,最大运动速度可达120μm/s。且驱动行程不受限制。给出了微驱动器在扫描隧道显微镜定位机构中的应用实例。

A novel inertial micro-actuator and its application in positioning mechanism

A new inertial micro-actuator based on piezo element directly driven by electronic circuits is developed.This article introduces the principle and setup of the actuator in detail.Some experiments are carried out to measure the micro displacement and dynamic property of the actuator.The experiments show that the actuator is capable of generating a smooth movement under the voltages of 20V~350V and 20Hz~125Hz.The average step ranges from 60nm~1502nm,and the maximum speed reaches to 120μm/s with infinite moving range.The application of the micro-actuator in scanning tunneling microscope for tip approaching is also discussed.