Effect of laser fluences on the structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation

Carbon nitride films were deposited by direct current plasma assisted pulsed laser ablation of a graphite target under a nitrogen atmosphere at room temperature. The surface morphology, composition and bonding structure of the deposited films were characterized by atomic force microscopy (AFM), Fourier transform infrared (FTIR) spectroscopy, Raman, and X-ray photoelectron spectroscopy (XPS). The effect of laser fluences in the range 0.5–3 J/cm² on the surface morphology, composition and bonding structure of the carbon nitride films were systematically studied. As laser fluence is increased, AFM results show a great decrease in the surface roughness of carbon nitride films. FTIR and XPS results indicate an increase in the N/C ratio and the content of N atoms bonded to sp³ C, as well as a decrease in the content of H atoms and the content of N atoms boned to sp² C in the deposited films, and Raman spectra indicate an increase in the content of disordered sp² C atoms and the sp² cluster size. The increase in the film density and the decrease in the particle fraction contribute to the decrease of surface roughness with increasing laser fluence.