| 溶胶-凝胶法制备ITO薄膜研究进展 |
| |
| 引用本文： | 张学骜,吴文健,满亚辉,刘长利.溶胶-凝胶法制备ITO薄膜研究进展[J].材料科学与工艺,2007,15(2):264-268. |
| |
| 作者姓名： | 张学骜 吴文健 满亚辉 刘长利 |
| |
| 作者单位： | 国防科技大学航天与材料工程学院,湖南,长沙,410073 |
| |
| 摘 要： | 概述了近年来国内外溶胶-凝胶法(Sol-Gel)制备ITO薄膜的研究状况,对Sol-Gel法制备ITO薄膜工艺做了简要介绍,重点讨论了Sol-Gel法制备ITO薄膜的溶胶体系,分析比较了有机醇盐、无机盐以及掺入ITO粉末方法体系的优缺点,最后讨论了甩膜法、提拉法及平铺法在Sol-Gel法制备ITO薄膜中镀膜的应用.指出Sol-Gel法是一种高效可行的制备ITO薄膜的方法,有着广阔的应用前景.
|
| 关 键 词： | 溶胶-凝胶法 ITO薄膜 制备 工艺 应用 |
| 文章编号： | 1005-0299(2007)02-0264-05 |
| 修稿时间： | 2004-09-28 |
Progress in preparation of ITO thin films by Sol-Gel process |
| |
| ZHANG Xue-ao,WU Wen-jian,MAN Ya-hui,LIU Chang-li.Progress in preparation of ITO thin films by Sol-Gel process[J].Materials Science and Technology,2007,15(2):264-268. |
| |
| Authors: | ZHANG Xue-ao WU Wen-jian MAN Ya-hui LIU Chang-li |
| |
| Abstract: | Recent progress in preparation of ITO thin films by Sol - Gel process was reviewed. The technological process in preparation of ITO thin films by Sol - Gel process was discussed briefly. Especially, the systems of sol in preparation of ITO thin films by Sol - Gel process, and the relative merits of the systems of sol about organic alkoxide, inorganic salt and the sol including ITO powder were discussed. At last, spin coating process, dip coating process and layering process were discussed. It was believed that the Sol - Gel process was a more efficient and viable way in preparation of ITO thin films, which had wide potential application. |
| |
| Keywords: | Sol - Gel Process ITO thin films preparation technological process application |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
